Refrigerant Gases

Refrigerant Gases

Home > Products > Refrigerant Gases > Trifluoromethane R23 CHF3, Refrigerant Gas

  • Trifluoromethane R23 CHF3, Refrigerant Gas

  • Trifluoromethane R23 CHF3, Refrigerant Gas

Trifluoromethane R23 CHF3, Refrigerant Gas

CAS No. 75-46-7
UN No. 1984
EINECS No. 200-872-4
Molecular weight 70.02
Appearance colorless, odorless
Melting point -155 ℃
Boiling point -84 ℃
Density 2.43kg/m3
DOT Class 2.2
Label Non-flammable gas


Trifluoromethane is an organic compound, colorless, odorless, non-conductive gas, and the ideal halothane replacement.


Trifluoromethane Gas, also known as Fluoroform, is a colorless, non-flammable, and non-corrosive gas that plays an essential role in modern industries such as semiconductors, refrigeration, and specialty chemicals. With its chemical formula CHF₃, it belongs to the hydrofluorocarbon (HFC) family and is known for its stability, dielectric strength, and low toxicity. Due to its specific characteristics, it has become a key material for advanced manufacturing processes that demand purity, precision, and reliability.


Chemical and Physical Properties

Trifluoromethane is a stable compound composed of carbon, hydrogen, and fluorine. It remains gaseous under normal temperature and pressure conditions and is completely odorless and colorless. The gas is non-flammable and has high thermal and chemical stability, which makes it suitable for high-tech processes requiring clean, inert environments.
Its boiling point is approximately minus eighty-two degrees Celsius, and it remains stable even under high-pressure storage conditions. Trifluoromethane has a relatively high global warming potential (GWP), so responsible handling and containment are critical during production and use.


Applications of Trifluoromethane Gas

Semiconductor Manufacturing

One of the most important uses of Trifluoromethane Gas is in the semiconductor industry. It is widely used as a plasma etching gas for the production of integrated circuits and microchips. When subjected to plasma discharge, trifluoromethane releases highly reactive fluorine radicals, which can precisely remove silicon oxide, silicon nitride, and other materials from wafer surfaces. Its controlled reactivity and clean etching properties make it a preferred choice for advanced microelectronics fabrication.


Refrigerant Intermediate

Trifluoromethane is also an important intermediate in the production of environmentally friendly refrigerants. It serves as a feedstock for manufacturing next-generation hydrofluorocarbon refrigerants such as R134a and R125. These refrigerants are widely used in air conditioning, refrigeration systems, and automotive cooling applications. As industries around the world move away from ozone-depleting substances, trifluoromethane has become an essential building block for sustainable cooling technologies.


Laser Gas Mixtures

In the field of industrial and medical lasers, Trifluoromethane Gas is used as a stabilizing or additive gas in CO₂ and excimer laser systems. It improves beam stability and enhances the energy output of laser devices. These properties make it valuable in applications such as precision cutting, material processing, and medical treatments where consistent laser performance is required.

Chemical Intermediate for Fluoropolymers

Trifluoromethane also serves as a raw material for producing fluoropolymers and other fluorochemicals. These include PTFE (polytetrafluoroethylene) and fluorinated coatings used in high-performance industries such as aerospace, automotive, and electronics. Its high fluorine content enables controlled reactions that result in superior chemical resistance and durability in the end products.


Safety and Environmental Considerations

Although trifluoromethane is non-toxic and non-flammable, it must be handled carefully due to its high global warming potential. Companies using this gas must ensure that it is properly stored, recovered, and recycled to minimize environmental impact.
It should be stored in high-pressure cylinders in cool, dry, and well-ventilated areas away from direct sunlight or heat sources. Appropriate materials such as stainless steel or nickel alloys should be used for pipelines and storage systems to prevent chemical reactions.
All operators should follow international safety regulations including OSHA, REACH, and ISO14001 standards. Using approved recovery systems and gas reclamation technologies helps reduce greenhouse gas emissions and supports sustainable industrial practices.


Conclusion

Trifluoromethane Gas (CHF₃) is a vital specialty gas that supports innovation in high-tech industries, particularly in semiconductor manufacturing, refrigerant production, and fluoropolymer synthesis. Its chemical stability, dielectric properties, and versatility make it indispensable for applications requiring high purity and precision.
As the world continues to emphasize sustainable development, companies using trifluoromethane must adopt responsible handling, recovery, and recycling practices to reduce environmental impact. Partnering with a trusted supplier ensures product consistency, safety, and compliance with international standards—enabling industries to advance efficiently and sustainably.


Trifluoromethane R23 CHF3, Refrigerant Gas



Usded as Refrigerant

Usded as Refrigerant

99.9% R23, Refrigerant Grade

Specification99.9%
Moisture≤2 ppm
Acidity (as HF)≤0.1 mg/kg
Reside on evaporation≤0.01 %
Foul gas in air phase≤0.1 %
Carbon Dichloride≤30 ppm

99.999% R23, Industrial Grade

Specification99.999%
Moisture≤10 ppm
Acidity (as HF)≤0.1 ppm
Nitrogen≤4 ppm
Oxygen≤1 ppm
Carbon Monoxide≤0.5 ppm
Carbon Dioxide≤0.5 ppm
Methane≤0.5 ppm
Other Organics≤1 ppm

*Other Grades and Purity Available on Asking

Package Information

Cylinder SpecificationsContents
Cylinder CapacityValveWeight
40LXF-430 kgs

*Other Packages Available on Asking

Loading Reference

Trifluoromethane R23 CHF3, Refrigerant Gas
Trifluoromethane R23 CHF3, Refrigerant Gas
Trifluoromethane R23 CHF3, Refrigerant Gas
Trifluoromethane R23 CHF3, Refrigerant Gas

Advantanges

More than fifteen years on the market.

ISO certificate manufacturer & Stable raw material source.

On-line analysis system for gas quality control in every step, highly close to 100% pass rate.

Experienced DG International Shipping Team by sea & air.