Specialty Gases

Specialty Gases

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  • Nitrogen Trifluoride, NF3 Specialty Gas

  • Nitrogen Trifluoride, NF3 Specialty Gas

  • Nitrogen Trifluoride, NF3 Specialty Gas

  • Nitrogen Trifluoride, NF3 Specialty Gas

Nitrogen Trifluoride, NF3 Specialty Gas

CAS No. 7783-54-2
UN No. 2451
EINECS No. 232-007-1
Molecular weight 71.0019
Appearance colourless, odourless
Melting point -206.79℃
Boiling point -129.0℃
Density 2.96kg/m3
DOT Class 2.2 & 5.1
Label Non-flammable Gas, Oxidizing Agent


Nitrogen trifluoride at room temperature is a colorless, odorless, stable gas, is a strong oxidant.


Used in the plasma etching of silicon wafers

Used in the plasma etching of silicon wafers

Used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers

Used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers

99.99% NF3, Semiconductor Grade

Specification99.99%
Carbon Tetrafluoride≤40 ppm
Nitrogen≤10 ppm
Oxygen+Argon≤5 ppm
Carbon Monoxide≤1 ppm
Carbon Dioxide≤3 ppm
Nitrous Oxide≤3 ppm
Sulfur Hexafluoride≤3 ppm
Moisture≤1 ppm
Express as HF≤1 ppm


99.996% NF3, Semiconductor Grade

Specification99.996%
Carbon Tetrafluoride≤20 ppm
Nitrogen≤5 ppm
Oxygen+Argon≤3 ppm
Carbon Monoxide≤1 ppm
Carbon Dioxide≤0.5 ppm
Nitrous Oxide≤1 ppm
Sulfur Hexafluoride≤2 ppm
Moisture≤1 ppm
Express as HF≤1 ppm

*Other Grades and Purity Available on Asking

Package Information

Cylinder SpecificationsContents
Cylinder CapacityValveWeight
10LDISS6404 kgs
47LDISS64020 kgs
440LDISS640195 kgs



*Other Packages Available on Asking

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Nitrogen Trifluoride, NF3 Specialty Gas
Nitrogen Trifluoride, NF3 Specialty Gas
Nitrogen Trifluoride, NF3 Specialty Gas
Nitrogen Trifluoride, NF3 Specialty Gas

Advantanges

More than fifteen years on the market.

ISO certificate manufacturer & Stable raw material source.

On-line analysis system for gas quality control in every step, highly close to 100% pass rate.

Experienced DG International Shipping Team by sea & air.