CAS No. | 7783-54-2 |
UN No. | 2451 |
EINECS No. | 232-007-1 |
Molecular weight | 71.0019 |
Appearance | colourless, odourless |
Melting point | -206.79℃ |
Boiling point | -129.0℃ |
Density | 2.96kg/m3 |
DOT Class | 2.2 & 5.1 |
Label | Non-flammable Gas, Oxidizing Agent |
Nitrogen trifluoride at room temperature is a colorless, odorless, stable gas, is a strong oxidant.
Used in the plasma etching of silicon wafers
Used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers
99.99% NF3, Semiconductor Grade
Specification | 99.99% |
Carbon Tetrafluoride | ≤40 ppm |
Nitrogen | ≤10 ppm |
Oxygen+Argon | ≤5 ppm |
Carbon Monoxide | ≤1 ppm |
Carbon Dioxide | ≤3 ppm |
Nitrous Oxide | ≤3 ppm |
Sulfur Hexafluoride | ≤3 ppm |
Moisture | ≤1 ppm |
Express as HF | ≤1 ppm |
99.996% NF3, Semiconductor Grade
Specification | 99.996% |
Carbon Tetrafluoride | ≤20 ppm |
Nitrogen | ≤5 ppm |
Oxygen+Argon | ≤3 ppm |
Carbon Monoxide | ≤1 ppm |
Carbon Dioxide | ≤0.5 ppm |
Nitrous Oxide | ≤1 ppm |
Sulfur Hexafluoride | ≤2 ppm |
Moisture | ≤1 ppm |
Express as HF | ≤1 ppm |
*Other Grades and Purity Available on Asking
Package Information
Cylinder Specifications | Contents | |
Cylinder Capacity | Valve | Weight |
10L | DISS640 | 4 kgs |
47L | DISS640 | 20 kgs |
440L | DISS640 | 195 kgs |
*Other Packages Available on Asking
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Advantanges
More than fifteen years on the market.
ISO certificate manufacturer & Stable raw material source.
On-line analysis system for gas quality control in every step, highly close to 100% pass rate.
Experienced DG International Shipping Team by sea & air.