Specialty Gases

Specialty Gases

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  • Carbon Tetrafluoride, CF4 Specialty Gas

  • Carbon Tetrafluoride, CF4 Specialty Gas

  • Carbon Tetrafluoride, CF4 Specialty Gas

Carbon Tetrafluoride, CF4 Specialty Gas

CAS NO 75-73-0
UN NO 1982
EINECS NO 200-896-5
Molecular weight 88
Appearance Colorless, Odorless
Melting point -184 ℃
Boiling point -128.1 ℃
Density 3.72 kg/m³
DOT Class 2.2
Label Non-flammable Gas


Teflon is a cryogenic refrigerant that is relatively inert under normal conditions, an oxygen displacer, and is also used in various wafer etching processes.

Tetrafluoromethane, also known as carbon tetrafluoride or R-14, is the simplest perfluorocarbon ( CF4 ). As its IUPAC name suggests, tetrafluoromethane is the perfluorinated counterpart of hydrocarbon methane. It can also be classified as haloalkane or halomethane. Tetrafluoromethane is a useful refrigerant, but also a potent greenhouse gas. It has a very high bond strength due to the nature of the carbon-fluorine bond.

Carbon Tetrafluoride Gas Usage

Tetrafluoromethane is sometimes used as a cryogenic refrigerant (R-14). It can be used alone for electronic microfabrication or in combination with oxygen as a plasma etchant for silicon, silicon dioxide and silicon nitride. It is also used in neutron detectors.



Plasma etching process for various integrated circuits

Plasma etching process for various integrated circuits

Low temperature refrigerant

Low temperature refrigerant

99.999% CF4, Electronic Grade

Specification99.999%
Oxygen + Argon≤ 1 ppm
Nitrogen≤ 2 ppm
Hydrogen≤ 0.3 ppm
Carbon Monoxide≤ 0.3 ppm
Carbon Dioxide≤ 0.3 ppm
Sulfur Hexafluoride≤ 0.3 ppm
THC≤ 0.3 ppm
Trifluoromethane≤ 0.3 ppm
OFC≤ 1 ppm
Moisture≤ 1 ppm
Acidity as HF≤ 0.1 ppm

*Other Grades and Purity Available on Asking

Package Information

Cylinder SpecificationsContents
Cylinder CapacityValveWeight
47LCGA58030 kgs

*Other Packages Available on Asking

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Carbon Tetrafluoride, CF4 Specialty Gas
Carbon Tetrafluoride, CF4 Specialty Gas
Carbon Tetrafluoride, CF4 Specialty Gas
Carbon Tetrafluoride, CF4 Specialty Gas

Advantanges

More than fifteen years on the market.

ISO certificate manufacturer & Stable raw material source.

On-line analysis system for gas quality control in every step, highly close to 100% pass rate.

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