Boron trichloride (BCL3) is a colorless fuming liquid or gas. Non-flammable, irritating, acidic odor.
Boron trichloride (BCl3) is a low vapor pressure gas. The molecule can be used in a wide range of applications, such as drying etching gases used for aluminum wiring in semiconductor and LCD manufacturing. Boron trichloride is a liquefied gas that decomposes in water into hydrogen chloride and boric acid. It is the main gas component in high-K and metal anisotropic plasma etching, atomic layer etching and pulsed plasma etching. BCL3 Gas is also mainly used for fine etching of aluminum circuits in the liquid crystal panel manufacturing process.
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Used in semiconductor manufacturing plasma etching, doping source, etc
As Organic Synthesis Catalyst in organic synthesis
for the preparation of high purity boron or organic boron
As intermediate in pharmaceutical production
99.9% BCL3, Industrial Grade
|Chlorine||≤ 10 ppm|
|Silicon Tetrachloride||≤ 300 ppm|
99.999% BCL3, Semiconductor Grade
|Oxygen||≤ 1 ppm|
|Carbon Monoxide||≤ 0.5 ppm|
|Carbon Dioxide||≤ 2 ppm|
|Methane||≤ 0.5 ppm|
|Phosgene||≤ 1 ppm|
*Other Grades and Purity Available on Asking
|47L||CGA 660||50 kgs|
*Other Packages Available on Asking
More than fifteen years on the market.
ISO certificate manufacturer & Stable raw material source.
On-line analysis system for gas quality control in every step, highly close to 100% pass rate.
Experienced DG International Shipping Team by sea & air.