Specialty Gases

Specialty Gases

Home > Products > Specialty Gases > Boron Trichloride, BCL3 Specialty Gas

  • Boron Trichloride, BCL3 Specialty Gas

  • Boron Trichloride, BCL3 Specialty Gas

  • Boron Trichloride, BCL3 Specialty Gas

Boron Trichloride, BCL3 Specialty Gas

CAS No.10294-34-5
UN No.1741
EINECS No.233-658-4
Molecular weight117.19
Appearancecolorless fuming liquid or gas with a pungent and sour taste
Melting point-107.3℃
Boiling point12.5℃
Density1.35 kg/m³
DOT Class2.3 & 8
LabelToxic Gas, Corrosives


Boron trichloride (BCL3) is a colorless fuming liquid or gas. Non-flammable, irritating, acidic odor. 

Boron trichloride (BCl3) is a low vapor pressure gas. The molecule can be used in a wide range of applications, such as drying etching gases used for aluminum wiring in semiconductor and LCD manufacturing. Boron trichloride is a liquefied gas that decomposes in water into hydrogen chloride and boric acid. It is the main gas component in high-K and metal anisotropic plasma etching, atomic layer etching and pulsed plasma etching. BCL3 Gas is also mainly used for fine etching of aluminum circuits in the liquid crystal panel manufacturing process.

How to find the right material?

Identifying the right product can be overwhelming, and our experts can help you find the best solution for your needs.



Used in semiconductor manufacturing plasma etching, doping source, etc

Used in semiconductor manufacturing plasma etching, doping source, etc

As Organic Synthesis Catalyst in organic synthesis

As Organic Synthesis Catalyst in organic synthesis

for the preparation of high purity boron or organic boron

for the preparation of high purity boron or organic boron

As intermediate in pharmaceutical production

As intermediate in pharmaceutical production

99.9% BCL3, Industrial Grade

Specification99.9%
Chlorine≤ 10 ppm
  Silicon Tetrachloride≤ 300 ppm

99.999% BCL3, Semiconductor Grade

Specification99.999%
Oxygen≤ 1 ppm
Nitrogen≤4 ppm
Carbon Monoxide≤ 0.5 ppm
Carbon Dioxide≤ 2 ppm
Methane≤ 0.5 ppm
Phosgene≤ 1 ppm 

*Other Grades and Purity Available on Asking

Package Information

Cylinder SpecificationsContents
Cylinder CapacityValveWeight
47LCGA 660 50 kgs


*Other Packages Available on Asking

Loading Reference

Boron Trichloride, BCL3 Specialty Gas
Boron Trichloride, BCL3 Specialty Gas
Boron Trichloride, BCL3 Specialty Gas
Boron Trichloride, BCL3 Specialty Gas

Advantanges

More than fifteen years on the market.

ISO certificate manufacturer & Stable raw material source.

On-line analysis system for gas quality control in every step, highly close to 100% pass rate.

Experienced DG International Shipping Team by sea & air.